Features
● Simple structure, integrated with vacuum pump, easy to maintain.
● Large flow type, mainly used for handling light and porous objects.
● With air blowing function.
Applications
● Silicon wafer
● Solar cell
How to order
SLW 115 PM - M10 I - F3
① ② ③ ④ ⑤ ⑥
② Specification
of suction cup
④ Specification of
vacuum pump
⑥ Mounting
(Flange)
100 - 100×55mm
115 - 115×115mm
146 - 146×146mm
170 - 170×105mm
120 - Φ120mm
PK - PEEK
PM - POM
AN - Aluminium base plate
+ NBR support cushion
APK - Aluminium base
plate +PEEK support
cushion
M10 - Airway Φ10mm
M15 - Airway Φ15mm
I - Vertical exhaust
Y - Lateral exhaust+
Fitting
S - Vertical exhaus+
Silencer
T - Vertical exhaust+
pagoda fitting
F1 - 55×6mm
F3 - 63×11mm
F9 - Triangular
flange
F12 - Circular
Selection
Specification of
suction cup
Specification
of vacuum
pump
Suction cup
material
Exhaust
direction
Mounting
◇ Note：“●”standard, in stock；“-”unavailable.
Technical parameters
Working
temperature
(℃)
Operating
pressure
range
(bar)
Air supply
Max.vacuum
flow
(NL/min)
Air
consumption
level
(-kPa)
Vacuum flow （NL/min）at different vacuum levels（-kPa）
Air supply pressure
Air consumption
0
1.5
Max.
vacuum
Air circuit diagram/Structural diagram
Dimensions（mm）
