Wafer Gripper
SLW Series
Wafer Gripper
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How to order
Technical parameters
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Features

● Simple structure, integrated with vacuum pump, easy to maintain.

● Large flow type, mainly used for handling light and porous objects.

● With air blowing function.



Applications

● Silicon wafer

● Solar cell


How to order


SLW  115  PM  -  M10  I  -  F3

   ①    ②     ③         ④   ⑤     ⑥


① Series

② Specification

osuction cup

③ Base plate material

④ Specification of

vacuum pump

⑤ Exhaust direction

⑥ Mounting

(Flange)

SLW

100 - 100×55mm

115 - 115×115mm

146 - 146×146mm

170 - 170×105mm

120 - Φ120mm


PK  - PEEK

PM - POM

AN  - Aluminium base plate

       + NBR support cushion

APK -  Aluminium base 

           plate +PEEK support

           cushion

M10 - Airway Φ10mm

M15 - Airway Φ15mm




I  - Vertical exhaust 

Y - Lateral exhaust+

      Fitting

S - Vertical exhaus+

     Silencer

T - Vertical exhaust+

     pagoda fitting

F1  - 55×6mm

F3  - 63×11mm

F9  - Triangular

        flange

F12 - Circular

         flange




Selection

Series

Specification of

suctiocup

Specification

of vacuum

pump

Suction cup

material

Exhaust

direction

Mounting       

F1    F3   F9 F12
SLW100-170M10PK, PMI, Y, S, T--
120M15AN, APKI--

◇ Note:“●”standard, in stock;“-”unavailable.


Technical parameters

Model

Working

temperature

(℃)

Operating

pressure

range

(bar)

Air supply

pressure

(bar)

Max.vacuum

flow

(NL/min)

Air 

consumption

(NL/min)

Max.vacuum

level

(-kPa)

SLW115-M100~60(Non-freezing)1-75.0400-43015011
SLW146-M100~60(Non-freezing)1-75.0410-44015011
SLW100-M100~60(Non-freezing)1-75.0330-46015011
SLW170-M100~60(Non-freezing)1-75.0350-49015011
SLW120-M100~60(Non-freezing)1-75.0370-4601507.5



Vacuum flow (NL/min)at different vacuum levels(-kPa)

Model

Air supply pressure

(bar)

Air consumption

(NL/min)

0

1.5

2.53.54.55.56.57.511

Max.

vacuum

level

(-kPa)

SLW115-M105.015040037536333431528926524621511
SLW146-M105.015041038637033032429627425823411
SLW100-M105.015033031128526342121919817916011
SLW170-M105.015035033031028026323821920018011
SLW120-M105.0150440429407385363335308275-7.5

 


Air circuit diagram/Structural diagram


image.png



NOItemMaterial
1Suction cup platePOM  PK  Aluminium alloy
2Side connection blockAluminium alloy
3Flange(Clamp)Aluminium alloy
4Vacuum pumpAluminium alloy
5Exhaust fittingAluminium alloy



Dimensions(mm)

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